✦ LIBER ✦

[ECS 208th ECS Meeting - Los Angeles, California (October 16-October 21, 2005)] ECS Transactions - Atomic Layer Deposition of NbN and Nb(Si)N for Metal Electrodes

✍ Scribed by Huotari, Hannu; Haukka, Suvi; Matero, Raija; Rahtu, Antti; Tois, Eva; Tuominen, Marko

No coin nor oath required. For personal study only.

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