An ECR ion source directly excited in a
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Toyohisa Asaji; Hiroshi Sasaki; Hideyuki Furuki; Yushi Kato; Shigeyuki Ishii; Mo
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Article
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2005
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Elsevier Science
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English
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An electron cyclotron resonance (ECR) ion source using a selected circular mode microwave is studied for material processing. It is expected to enhance efficiency of ECR. A cavity resonator of large diameter (280 mm) is constructed for simulated experiments, and excitation of several modes in the re