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Eccentricity estimation with error modeling in dynamic wafer handling

✍ Scribed by Heping Chen, Hongtai Cheng, Ben Moorings…


Book ID
120742575
Publisher
Springer
Year
2013
Tongue
English
Weight
843 KB
Volume
68
Category
Article
ISSN
0268-3768

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📜 SIMILAR VOLUMES


Dynamic aspects of the error in eccentri
✍ Robert E. Miller 📂 Article 📅 1980 🏛 John Wiley and Sons 🌐 English ⚖ 336 KB

## Abstract The usual linear shape function for approximating axial displacements in beam finite elements used as eccentric stiffeners or as portions of composite cross‐sections, leads to an error in the static deflection. A modified element reduces this error. The behaviour of these two elements u