e-Induced secondary electron emission yield of insulators and charging effects
β Scribed by J. Cazaux
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 548 KB
- Volume
- 244
- Category
- Article
- ISSN
- 0168-583X
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β¦ Synopsis
Based on a more realistic description of the in-depth secondary electron generation than that of standard (constant loss) model, a new model for the e-induced secondary electron emission yield, d = f(E 0 ), is applied to account for the observed mean atomic number dependence of the reduced yield curves (RYC), d=d max ΒΌ f Γ°E 0 =E 0 max Γ of a wide variety of inorganic insulators. It is next used to extract and to discuss physical information on secondary electron escape probability and attenuation length of a number of oxides and alkali halides and to deduce their X-ray-induced secondary electron emission yield, d X = f(hm). Extrapolation of experimental data above the few keV energy range including the estimate of the nominal critical energy E 0 2 is also illustrated. Correlation between time dependence of charging and of secondary electron emission is next analyzed and various charging effects such as the observed negative charging when a positive charging was expected or the possible change of sign of the specimen current, are explained by the difference between E 0 2 and E C 2 (critical energy obtained under permanent irradiation). Strategies to identify charging effects via their influence on the distortion of the yield curve and to reduce them are finally suggested.
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