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e-Induced secondary electron emission yield of insulators and charging effects

✍ Scribed by J. Cazaux


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
548 KB
Volume
244
Category
Article
ISSN
0168-583X

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✦ Synopsis


Based on a more realistic description of the in-depth secondary electron generation than that of standard (constant loss) model, a new model for the e-induced secondary electron emission yield, d = f(E 0 ), is applied to account for the observed mean atomic number dependence of the reduced yield curves (RYC), d=d max ¼ f ðE 0 =E 0 max Þ of a wide variety of inorganic insulators. It is next used to extract and to discuss physical information on secondary electron escape probability and attenuation length of a number of oxides and alkali halides and to deduce their X-ray-induced secondary electron emission yield, d X = f(hm). Extrapolation of experimental data above the few keV energy range including the estimate of the nominal critical energy E 0 2 is also illustrated. Correlation between time dependence of charging and of secondary electron emission is next analyzed and various charging effects such as the observed negative charging when a positive charging was expected or the possible change of sign of the specimen current, are explained by the difference between E 0 2 and E C 2 (critical energy obtained under permanent irradiation). Strategies to identify charging effects via their influence on the distortion of the yield curve and to reduce them are finally suggested.


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