✦ LIBER ✦
E-beam proximity correction for negative tone chemically amplified resists taking into account post-bake effects
✍ Scribed by N. Glezos; G.P. Patsis; A. Rosenbusch; Z. Cui
- Book ID
- 114155798
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 273 KB
- Volume
- 41-42
- Category
- Article
- ISSN
- 0167-9317
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