✦ LIBER ✦
E-beam probe station with integrated tool for electron beam induced etching
✍ Scribed by Dieter Winkler; Hans Zimmermann; Margot Mangerich; Robert Trauner
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 688 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0167-9317
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