E-beam lithography: a standard tool? : Pieter S. Burggraaf. Semiconductor Int., 41 (September 1982)

• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 73 KB
• Volume: 23
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(83)91361-6