✦ LIBER ✦

Dynamic study of the thermal laser stimulation response on advanced technology structures

✍ Scribed by A. Reverdy; M. de la Bardonnie; P. Poirier; H. Murray; P. Perdu; A. Boukkali

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 848 KB
Volume: 48
Category: Article
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2008.05.003

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✦ Synopsis

Thermal laser stimulation on sub-Micronics interconnection structures is well known. The usual approach is to consider them as a resistor, whatever the structure is. We experimentally showed the weaknesses of this assumption which has to be reconsidered. In this paper we develop a new analytical model based on fine characterization of the dynamic behavior structure heated and cooled. In addition to a better understanding of thermal laser stimulation signature, this modelization opens a wide range of application: structure identification, 3-D localization, etc. It should be a key for failure analysis accuracy and efficiency on Back End Of the Line test structures.

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