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Dynamic space charge effect correction in cell projection lithography

โœ Scribed by Yasunari Sohda; Hidetoshi Satoh; Yasuhiro Someda; Norio Saitou; Hiroyuki Itoh; Minoru Sasaki


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
784 KB
Volume
363
Category
Article
ISSN
0168-9002

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Excitations of a superlattice with a com
โœ Yun Zhu; Shixun Zhou ๐Ÿ“‚ Article ๐Ÿ“… 1988 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 114 KB

Received 25 July t987) A semiconductor superlattlce with a complex unit cell in an external magnetic field Is considered. The effect of background charge dynamics is also discussed. The cyclotron-acoustic plasmons have been found.