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This patent refers to equipment used in the manufacture of flat panel displays. As these are manufactured in larger sizes the sealing of the doors to the vacuum chambers required in the process presents a challenge. Apparatuses and methods are provided for sealing a slit valve passage. After the two components of the slit door are closed together the sealing force may be adjusted by varying the gas pressure to the seal depending on pressure conditions in the process chambers.
๐ SIMILAR VOLUMES
This patent describes the manufacture of a seal with graded properties that may be used as the bearing seal in a down-hole rock bit. A property gradient is formed in a seal, or a section of the seal, from the exterior surface inwards without changing the seal composition.
A sealing system for a vibratory screening machine is described. The machines may be used for either separating dry particles of different sizes or separating solids from a liquid. The seal is to overcome problems of screen wear and noise plus leakage of product. The frames of the screens are fitted
torr to 10-z torr. Experiments confirm
The packaging for scented products described here enables the scent to be sampled without direct contact. Part of the packaging is made from scented material, so that the tamper-evident seal need not be disturbed to sample the scent.