✦ LIBER ✦
Dynamic Response Modeling of MEMS Micromirror Corner Cube Reflectors With Angular Vertical Combdrives
✍ Scribed by Young Ki Hong; Syms, R.R.A.
- Book ID
- 115372147
- Publisher
- Optical Society of America
- Year
- 2007
- Tongue
- English
- Weight
- 501 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0733-8724
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