Dynamic modelling of high dose oxygen profiles in SIMOX substrates

✍ Scribed by U. Bussmann; P.L.F. Hemment; R.P. Webb; A.K. Robinson

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 370 KB
• Volume: 12
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/0921-5107(92)90262-8