Dynamic Modeling and Analysis of a 3-DOF Ultra-precision Positioning Stage with Air Bearinga

✍ Scribed by Cai Tian; Zhang Ming; Zhu Yu; Hu Chuxiong

• Book ID: 119353599
• Publisher: Elsevier
• Year: 2011
• Tongue: English
• Weight: 324 KB
• Volume: 16
• Category: Article
• ISSN: 1877-7058
• DOI: 10.1016/j.proeng.2011.08.1082