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Dynamic measurement of oxygen diffusion in indium-tin oxide

โœ Scribed by J. Berger; I. Riess; D.S. Tannhauser

Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
489 KB
Volume
15
Category
Article
ISSN
0167-2738

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Preparation and characterization of indi
Preparation and characterization of indium tin oxide films formed by oxygen ion beam assisted deposition
โœ C. Liu; T. Mihara; T. Matsutani; T. Asanuma; M. Kiuchi ๐Ÿ“‚ Article ๐Ÿ“… 2003 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 195 KB

Indium tin oxide (ITO) films were produced by low-energy oxygen ion beam assisted electron-beam evaporation. The dependence of surface morphology, electrical and optical properties on evaporation rate, oxygen ion beam energy and density, as well as substrate temperatures was characterized by atomic