✦ LIBER ✦
Dynamic characteristics of membrane displacement of a bidirectional electromagnetic microactuator with microcoil fabricated on a single wafer
✍ Scribed by J. Sutanto; A.D. Papania; Y.H. Berthelot; P.J. Hesketh
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 292 KB
- Volume
- 82
- Category
- Article
- ISSN
- 0167-9317
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