A commercial metrological scanning force microscope (SFM) has been modiรed to further improve its metrological performance and calibration. For this purpose, a three-dimensional (3D) measuring system consisting of three miniature laser interferometers has been incorporated into the SFM. Special att
โฆ LIBER โฆ
Dynamic calibration and compensation of a 3D laser radar scanning system
โ Scribed by Y. Chen; J. Ni
- Book ID
- 126664302
- Publisher
- IEEE
- Year
- 1993
- Tongue
- English
- Weight
- 596 KB
- Volume
- 9
- Category
- Article
- ISSN
- 1042-296X
No coin nor oath required. For personal study only.
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