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Dust particle dynamics in low-pressure plasma reactor

✍ Scribed by Davoudabadi, M.; Mashayek, F.

Book ID
120303828
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
436 KB
Volume
100
Category
Article
ISSN
0021-8979

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Dust particles in low-pressure plasmas:
Dust particles in low-pressure plasmas: Formation and induced phenomena
✍ Mikikian, Maxime; Cavarroc, Marjorie; CouΓ«del, LΓ©naΓ―c; Tessier, Yves; Boufendi, πŸ“‚ Article πŸ“… 2010 πŸ› International Union of Pure and Applied Chemistry 🌐 English βš– 927 KB

Formation of dust particles is a common mechanism in low-pressure plasmas. These big particles (in comparison with other plasma species) are sometimes the desired final products of the process, but they may also constitute a severe drawback in certain contexts. In either situation, it is necessary t