Wide-range length metrology by dual-imag
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Dongxian Zhang; Haijun Zhang; Xiaofeng Lin
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Article
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2004
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John Wiley and Sons
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English
⚖ 190 KB
## Abstract A new dual‐imaging‐unit atomic force microscope (DIU‐AFM) was developed for wide‐range length metrology. In the DIU‐AFM, two AFM units were combined, one as a reference unit, and the other a test one. Their probes with __Z__ piezo elements and tips were horizontally set in parallel at t