✦ LIBER ✦
Dual-temperature encapsulation of phosphorus in germanium δ‐layers toward ultra-shallow junctions
✍ Scribed by G. Scappucci; G. Capellini; W.M. Klesse; M.Y. Simmons
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 335 KB
- Volume
- 316
- Category
- Article
- ISSN
- 0022-0248
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