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Dual-Source Atmospheric Pressure CVD of Amorphous Molybdenum Phosphide Films on Glass Using Molybdenum(V) Chloride and Cyclohexylphosphine.

✍ Scribed by Christopher S. Blackman; Claire J. Carmalt; Troy D. Manning; Shane A. O'Neill; Ivan P. Parkin; Leonardo Apostolico; Kieran C. Molloy

Publisher: John Wiley and Sons
Year: 2003
Weight: 67 KB
Volume: 34
Category: Article
ISSN: 0931-7597
DOI: 10.1002/chin.200316235

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