Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope

✍ Scribed by Huiliang Cao

Publisher: Springer Nature
Year: 2023
Tongue: English
Leaves: 231
Category: Library

No coin nor oath required. For personal study only.

✦ Synopsis

This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.

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