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Dual implantation of Si+ + P+ into GaAs

✍ Scribed by W.D. Fan; W.Y. Wang

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Dual implantation of Si and P into GaAs

✍ Rybka, V. ;Deml, F. ;Hampl, P. 📂 Article 📅 1984 🏛 John Wiley and Sons 🌐 English ⚖ 150 KB

Si-implantation into GaAs grown on Si

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Laser annealing of GaAs dual implanted w

✍ V. Rybka; V. Odzhayev; J. Červená; V. Hnatowicz; J. Kvítek; H. Jelínková 📂 Article 📅 1987 🏛 Springer 🌐 English ⚖ 246 KB

Dual implantation of Ga and Ge into GaAs

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val ue for ,/I Q /I,. Some examples are given showing that accuracres of 4 I 'Z, can be obtai ned for peaks wrth .

Si ion implantation into LEC semi-insula

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✍ Shigetomi, S. ;Matsumori, T. 📂 Article 📅 1986 🏛 John Wiley and Sons 🌐 English ⚖ 200 KB