✦ LIBER ✦
Dry etching pattern transfer of 0.3 μm structures in technological layers using transmission phase masks
✍ Scribed by L. Bauch; A. Wolff; U. Jagdhold; T. Skaloud; J. Bauer
- Book ID
- 103599334
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 450 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0167-9317
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