✦ LIBER ✦
Dry etching of magnetic tunnel junctions monitored by spectroscopic reflectance
✍ Scribed by E.H. Oubensaid; B. Blein; B. Vilquin; B. Bartenlian; P. Lecoeur; J. Aubert; C. Schwebel
- Book ID
- 113810385
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 566 KB
- Volume
- 14
- Category
- Article
- ISSN
- 1369-8001
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