✦ LIBER ✦
Dry etching of GaAs with Cl2: correlation between the surface Cl coverage and the etching rate at steady state
✍ Scribed by Chaochin Su; Ming Xi; Zi-Guo Dai; Matthew F. Vernon; Brian E. Bent
- Book ID
- 104199101
- Publisher
- Elsevier Science
- Year
- 1993
- Weight
- 61 KB
- Volume
- 282
- Category
- Article
- ISSN
- 0167-2584
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