Dry etching of all-oxide transparent thin film memory transistors

✍ Scribed by J.B. Giesbers; M.W.J. Prins; J.F.M. Cillessen; H.A. van Esch

• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 297 KB
• Volume: 35
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(96)00152-9