✦ LIBER ✦
Dry etch resistance of metal-free and halogen-substituted resist materials : Hiroshi Gokan, Katsumi Tanigaki and Yoshitake Ohnishi. Solid St. Technol. 163 (May 1985)
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 132 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0026-2714
No coin nor oath required. For personal study only.