Dry etch development for silicon processing within a teaching institution : M. A. Carter. Vacuum 38(8–10), 873 (1988)

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 116 KB
• Volume: 30
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(90)90105-v