Dry cleaning for metallic contaminants removal as the second cleaning process after the CMP process

✍ Scribed by Jong-Min Lim; Bu-yong Jeon; Chongmu Lee

• Book ID: 114192619
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 624 KB
• Volume: 70
• Category: Article
• ISSN: 0254-0584
• DOI: 10.1016/s0254-0584(00)00481-8