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Drift of nonlinearity in the heterodyne interferometer

✍ Scribed by Wenmei Hou; Xianbin Zhao

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
891 KB
Volume
16
Category
Article
ISSN
0141-6359

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Metrological feasibilities of a high-resolution grating interferometer (GI) based on a transverse Zeeman laser are investigated. When the grating pitch equals 20 mm, a resolution of 0.7 nm is obtained by means of a heterodyne signal processing method. The comparison of two approaches for determining