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Downstream plasma characteristics from a single loop antenna in a helicon processing reactor

✍ Scribed by Carter, C; Khachan, J

Book ID: 118172717
Publisher: Institute of Physics
Year: 1999
Tongue: English
Weight: 232 KB
Volume: 8
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/8/3/313

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