Double layer resist process scheme for metal lift-off with application in inductive heating of microstructures

✍ Scribed by L. Ouattara; M. Knutzen; S. Keller; M.F. Hansen; A. Boisen

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 434 KB
• Volume: 87
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2009.11.147