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Double-layer fabrication scheme for large-area polymeric photonic crystal membrane on silicon surface by multibeam interference lithography

✍ Scribed by Ping Zhang, A.; Burzynski, Ryszard; Yoon, Yong-Kyu; Prasad, Paras N.; He, Sailing


Book ID
115430769
Publisher
Optical Society of America
Year
2008
Tongue
English
Weight
434 KB
Volume
33
Category
Article
ISSN
0146-9592

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