✦ LIBER ✦
Dose loss and segregation of boron and arsenic at the Si/SiO2 interface by atomistic kinetic Monte Carlo simulations
✍ Scribed by J.E. Rubio; M. Jaraiz; I. Martin-Bragado; P. Castrillo; R. Pinacho; J. Barbolla
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 279 KB
- Volume
- 124-125
- Category
- Article
- ISSN
- 0921-5107
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