Dose accuracy and doping uniformity of ion implantation equipment : D. S. Perloff, J. N. Gan and F. E. Wahl. Solid-St. Technol.112 (February 1981)

• Book ID: 103280316
• Publisher: Elsevier Science
• Year: 1981
• Tongue: English
• Weight: 176 KB
• Volume: 21
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(81)90233-x