✦ LIBER ✦
Doppler-broadened Hα line shapes in A dc low-pressure discharge for TiN deposition
✍ Scribed by G. Sultan; G. Baravian; M. Gantois; G. Henrion; H. Michel; A. Ricard
- Book ID
- 107942358
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 621 KB
- Volume
- 123
- Category
- Article
- ISSN
- 0301-0104
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