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Doping of microcrystalline Si:H,Cl films in R.F. glow discharge

✍ Scribed by Giovanni Bruno; Pio Capezzuto; Francesco Cramarossa; Vincenzo Barbarossa; Vincenzo Augelli; Roberto Murri

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Deposition rate and structural propertie

✍ G. Bruno; P. Capezzuto; F. Cramarossa 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 452 KB

Raman Scattering in Glow Discharge Si:H:

✍ Danesh, P. ;Savatinova, I. ;Anachkova, E. ;Georgiev, St. 📂 Article 📅 1986 🏛 John Wiley and Sons 🌐 English ⚖ 373 KB

Microcrystalline structure of poly-Si fi

✍ A.H. Jayatissa; M. Suzuki; Y. Nakanishi; Y. Hatanaka 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 496 KB

Hydrogen incorporation, doping and thick

✍ G. Moller; G. Winterling; S. Kalbitzer; M. Reinelt 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 182 KB

Plasma effects on fluorine incorporation

✍ J.E. Potts; E.M. Peterson; J.A. McMillan 📂 Article 📅 1984 🏛 Elsevier Science ⚖ 248 KB

Comparison of strain in glow discharge a

✍ R. Weil; I. Abdulhalim; R. Beserman; M. Janai; B. Pratt 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 178 KB