Doping of epitaxial CVD silicon with arsenic or phosphorus (II). Non-steady state conditions

✍ Scribed by Dr. H. Kühne

• Publisher: John Wiley and Sons
• Year: 1985
• Tongue: English
• Weight: 355 KB
• Volume: 20
• Category: Article
• ISSN: 0232-1300
• DOI: 10.1002/crat.2170200605