✦ LIBER ✦
Dopant Redistribution during Rapid Thermal Annealing in a Self-Aligned Polysilicon Emitter Bipolar Structure Compatible with a Complementary Metal-Oxide-Semiconductor Technology
✍ Scribed by Merabet, A. ;Gontrand, C.
- Book ID
- 105384292
- Publisher
- John Wiley and Sons
- Year
- 1994
- Tongue
- English
- Weight
- 619 KB
- Volume
- 145
- Category
- Article
- ISSN
- 0031-8965
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