Dopant enhanced H diffusion in amorphous silicon and its effect on the kinetics of solid phase epitaxy

✍ Scribed by B.C. Johnson; P. Caradonna; J.C. McCallum

• Book ID: 108215619
• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 534 KB
• Volume: 157
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2008.11.047