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Dominant reaction channels and the mechanism of silane decomposition in a H2-Si(s)-SiH4glow discharge

✍ Scribed by K. Ensslen; S. Vepřek

Publisher: Springer
Year: 1987
Tongue: English
Weight: 842 KB
Volume: 7
Category: Article
ISSN: 0272-4324
DOI: 10.1007/bf01019174

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