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Does the outgassing rate of UHV chambers depend on pumping speed?

✍ Scribed by Karl Jousten

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 95 KB
Volume: 47
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(95)00245-6

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