Carbon nanotubes in interconnect applica
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F Kreupl; A.P Graham; G.S Duesberg; W SteinhΓΆgl; M Liebau; E Unger; W HΓΆnlein
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Article
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2002
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Elsevier Science
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English
β 817 KB
Carbon nanotubes with their outstanding electrical and mechanical properties are suggested as an interconnect material of the future. In this paper we will introduce nanotubes, compare their electrical properties with equivalent metal wires made of gold and describe our progress in process integrati