Distortion of depth profiles during sputtering: I. General description of collisional mixing

✍ Scribed by P. Sigmund; A. Gras-Marti

• Book ID: 103303853
• Publisher: Elsevier Science
• Year: 1980
• Weight: 440 KB
• Volume: 168
• Category: Article
• ISSN: 0029-554X
• DOI: 10.1016/0029-554x(80)91281-1