Dissolution behavior of tetrafluoroethylene-based fluoropolymers for 157-nm resist materials

✍ Scribed by Takuji Ishikawa; Tesuhiro Kodani; Tomohiro Yoshida; Tsukasa Moriya; Tsuneo Yamashita; Minoru Toriumi; Takayuki Araki; Hirokazu Aoyama; Takuya Hagiwara; Takamitsu Furukawa; Toshiro Itani; Kiyoshi Fujii

• Book ID: 108170332
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 230 KB
• Volume: 125
• Category: Article
• ISSN: 0022-1139
• DOI: 10.1016/j.jfluchem.2004.09.012