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Dissociative excitation of SiH4 by electron impact: emission cross sections for fragment species

โœ Scribed by S. Tsurubuchi; K. Motohashi; S. Matsuoka; T. Arikawa


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
601 KB
Volume
161
Category
Article
ISSN
0301-0104

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