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Dissociative chemisorption of NF3 at Si(100) surfaces

✍ Scribed by J.A. Shorter; J.G. Langan; J.I. Steinfeld

Publisher: Elsevier Science
Year: 1989
Weight: 265 KB
Volume: 219
Category: Article
ISSN: 0167-2584
DOI: 10.1016/0167-2584(89)90267-3

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