Dissociation, transformation, and recombination of Si‐H bonds in hydrogenated crystalline silicon determined by in situ micro-Raman spectroscopy

In-situ monitoring of laser annealing by

In-situ monitoring of laser annealing by micro-Raman spectroscopy for hydrogenated silicon nanoparticles produced in radio frequency glow discharge

✍ Hill, D. ;Jawhari, T. ;Cespedes, J. García ;García, J. Alvarez ;Bertran, E. 📂 Article 📅 2006 🏛 John Wiley and Sons 🌐 English ⚖ 657 KB

## Abstract Low temperature Plasma Enhanced Chemical Vapour Deposition (PECVD) grown amorphous hydrogenated Si (a‐Si:H) thin films form the basis of many photovoltaic and microelectronic devices such as solar cells and TFTs. Amorphous hydrogenated silicon in the form of nanoparticles has been produ