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Dissociation kinetics of molecular hydrogen in a microwave plasma and its influence on the hydrogen content in diamond films

✍ Scribed by Tarun Sharda; D.S Misra; D.K Avasthi; G.K Mehta


Book ID
118361539
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
501 KB
Volume
98
Category
Article
ISSN
0038-1098

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## Abstract In this work, we study the influence of oxygen additive in the gas phase on hydrogen impurity incorporation into thick nanocrystalline diamond (NCD) films. Various diamond samples were grown on large silicon wafers of 5.08 cm diameter by adjusting the amount of oxygen and nitrogen addit