Dislocation Structures in Si:C Films : Generating “Plateau-Like” Surface Defects?

✍ Scribed by T. Marek; M. Werner; P. Lavéant; G. Gerth; P. Werner

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 147 KB
• Volume: 35
• Category: Article
• ISSN: 0232-1300
• DOI: 10.1002/1521-4079(200007)35:6/7<769::aid-crat769>3.0.co;2-s